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Silicon Die and Microstructures
For OEM Applications
All use piezoresistive silicon technology.
MS72xx MS73xx
Unique Features - Piezoresistive pressure die - Piezoresistive pressure die
- Top cavity - hermetic sensor - Low pressure sensor
- For harsh environment - High sensitivity
Linearity ±0.05% FSO (MS7212A) ±0.3% FSO (MS7305)
Output / Span 150 mV @ 5 V 110 mV @ 5 V
Type Absolute Differential
Pressure Range 0 - 1, 2, 4, 7, 12, 18, 28, 36 bar 0 - 50 mbar (MS7305)
Overpressure FS range dependent 6 bar
5 bar (MS7201-A2)
170 bar (MS7236-A)
Operating Temp -40°C to 125°C -40°C to 125°C
0 - 100 mbar (MS7310)
P6393
- Piezoresistive pressure die
- Silicon-pyrex construction
- Open bridge
±0.1% FSO
110 mV @ 1.5 mA
Differential, absolute
0 - 2, 5, 10, 15, 30, 50, 250,
500 psi
5X
-40°C to 125°C
P7405
- Piezoresistive pressure die for
high pressure applications
- Open bridge
±0.25% FSO
125 mV @ 1.5 mA
Absolute
0 - 1000, 3000, 5000, 10000 psi
3X
-40°C to 125°C
Dimensions (mm)
1.35 x 1.79 (MS7201-A2)
2.45 x 2.45
3.0 x 4.0
1.80 x 1.80
1.95 x 1.63 (MS7236-A)
Typical Apps
Braking systems, transmission
systems, engine controls
Heating ventilation and air
conditioning, medical, industrial
Process control, automation,
refrigeration
Can be packaged in an isolated
oil-filled transmitter for harsh
Disposable Medical Products
mV Outputs
All use piezoresistive silicon technology.
controls
media
1620, 1630
Fully Assembled 1620
(Customized per customer specification)
Package
Type
Pressure Range
Output / Span
Unique Features
Accuracy
Operating Temp
Dimensions (mm)
Typical Apps
Invasive blood pressure monitoring
Gage
-30 to 300 mmHg
5 uV/V/mmHg
- Low cost, disposable design
- Supplied in tape and reel
- Compliant to AAMI spec
1.0% FSO
10°C to 40°C
1620: 8.13 x 11.43 x 4.20
1630: 5.08 x 12.7 x 3.94
Disposable blood pressure, surgical
procedures, ICU, kidney dialysis
machines, medical instrumentation
Invasive blood pressure monitoring
Gage
-30 to 300 mmHg
5 uV/V/mmHg
- Low cost, disposable design
- Compliant to AAMI spec
- ISO13485 Certified
- Custom designs available
1.0% FSO
10°C to 40°C
42.8 x 30.3 x 19.0
Disposable blood pressure, kidney dialysis machines, surgical
procedures and intensive care units.
Ready to use, fully assembled disposable sensor units with cable,
connector, stop cock, flush device in a plastic housing.
Pressure
13
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